Low cost thin film capacitor

Details Low cost thin film capacitor Low cost thin film capacitor

1983-06-17

1984-06-05

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

29 2542, 427 79, H01G 114, H01G 1300, B05D 512

Patent

active

044531990

ABSTRACT:
The present invention relates to a low cost method of fabricating capacitors within tight tolerance ranges. The method involves forming, by vapor deposition or the like, discrete electrode areas on an insulating substrate, and depositing a dielectric layer over the substrate and the areas between the electrodes. A further series of electrode are formed over the dielectric in partial registry with the first mentioned electrodes, and the substrate is thereafter diced to expose opposed edge portions of the resultant capacitors. The capacitors are terminated preferably by a sputtering technique, the sputtered material being insulated from contact with the edge portions of non-exposed electrodes by the deposited dielectric.

REFERENCES:
patent: 2759854 (1956-08-01), Kilby
patent: 3457614 (1969-07-01), Tibol
patent: 3469294 (1969-09-01), Hayashi et al.
patent: 3591905 (1971-07-01), Elderbaum
patent: 3669733 (1972-06-01), Allington
patent: 3679942 (1972-07-01), Daly
patent: 3778689 (1973-12-01), Bodway
patent: 3809973 (1974-05-01), Hurley
patent: 4410867 (1983-10-01), Arcidiacono et al.

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