Low cost, high pumping rate electrostatically actuated mesopump

Details Low cost, high pumping rate electrostatically actuated mesopump Low cost, high pumping rate electrostatically actuated mesopump

1998-06-25

2000-08-22

Thorpe, Timothy S.

Pumps

Motor driven

Magnetostrictive chamber

4174131, 4174133, 417 62, F04B 3500

Patent

active

061062456

ABSTRACT:
A mesopump having a plurality of elementary cells. The cells each have a body forming a cavity having an electrode on one curved surface and a second surface facing the electrode. Electrical connections selectively energize the electrode. A diaphragm is mounted under tensile load with its major portion located in the cavity so that the diaphragm deflects toward the electrode surfaces upon application of voltage to the electrode and returns to its original position when voltage is stopped. A lateral conduit is located at at least one end of the body for fluid communication with the cavity. The lateral conduits are operably connected to a portion of the diaphragm mounted in the body and are opened and closed by movement of the diaphragm. A vertical conduit on at least one curved surface controls flow of fluid by movement of the diaphragm into and out of contact with the vertical conduit. The cells are interconnected to form the mesopump whereby activation of the electrodes causes movement of the diaphragm between the electrodes to move fluid into and out of the body. The preferred mesopump includes sets of three cell groups so that fluid enters a first cell from a source of fluid, is expelled to a second cell through a vertical conduit; expelled via a lateral conduit to a third cell, and expelled therefrom, whereby fluid passes from cell to cell upon activation of the electrodes.

REFERENCES:
patent: 3381623 (1968-05-01), Elliot
patent: 3803424 (1974-04-01), Smiley et al.
patent: 4115036 (1978-09-01), Paterson
patent: 4453169 (1984-06-01), Martner
patent: 4498850 (1985-02-01), Perlov et al.
patent: 4938742 (1990-07-01), Smits
patent: 5078581 (1992-01-01), Blum et al.
patent: 5096388 (1992-03-01), Weinberg
patent: 5176358 (1993-01-01), Ohnstein
patent: 5180288 (1993-01-01), Richter et al.
patent: 5192197 (1993-03-01), Culp
patent: 5499909 (1996-03-01), Yamada et al.
patent: 5725363 (1998-03-01), Bustgens et al.
patent: 5759014 (1998-06-01), Van Lintel
patent: 5759015 (1998-06-01), Van Lintel et al.
Cabuz, "Tradeoffs in MEMS Materials", SPIE vol. 2881, p. 160 (Oct. 1996).
Bertz, Schubert, Werner, "Silicon Grooves with Sidewall Angles down to 1.degree. made by Dry Etching".
Bustgens,Bacher,Menz,Schomburg, "Micropump Manufactured by Thermoplastic Molding" MEMS 1994.
Wagner,Quenzer, Hoerschelmann,Lisec,Juerss, "Bistable Microvalve with Pneumatically Coupled Membranes," 0-7803-2985-6/96 IEEE (1996).
Branebjerg,Gravesen "A New Electrostatic Actuator Providing Improved Stroke Length and Force," Micro Electro Mechanical Systems (Feb. 4-7, 1992).

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