Low cost high-pressure sensor

Details Low cost high-pressure sensor Low cost high-pressure sensor

2007-08-28

2007-08-28

Allen, Andre J. (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S727000, C361S283100

Reexamination Certificate

active

11266708

ABSTRACT:
A pressure sensing apparatus including a thin disc of a metal having a ceramic material layer and piezoresistive elements formed thereon. A surface of the disc is bonded to a diaphragm assembly on a pressure port base constructed of a low cost metal. The bonding process is performed at low temperatures, (<700° C.), so that the diaphragm assembly and pressure port do not require high temperature corrosion resistance, and can thus be formed of less expensive materials. The inventive apparatus provides a lower cost alternative to conventional high pressure sensors since less material is used, less expensive materials are used, and fabrication is less complex. The inventive apparatus is also more reliable and exhibits greater thermal stability than conventional high pressure sensors.

REFERENCES:
patent: 4207604 (1980-06-01), Bell
patent: 4388668 (1983-06-01), Bell et al.
patent: 4426673 (1984-01-01), Bell et al.
patent: 4445385 (1984-05-01), Endo
patent: 4986861 (1991-01-01), Nishida et al.
patent: 5872315 (1999-02-01), Nagase et al.
patent: 6877380 (2005-04-01), Lewis

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