Low cost, high average power, high brightness solid state laser

Details Low cost, high average power, high brightness solid state laser Low cost, high average power, high brightness solid state laser

1994-08-24

1995-07-18

Scott, Jr., Leon

Coherent light generators

Particular beam control device

Control of pulse characteristics

372 18, 372 12, 372 13, 372 22, 372 30, 372 31, 372 70, H01S 310

Patent

active

054348757

ABSTRACT:
A high average power, high brightness solid state laser system. A laser produces a first pulse laser beam with a high pulse frequency. A pulse spacing selector removes from the first pulse laser beam more than 80 percent of the pulses to produce a second pulse laser beam having a series of periodically spaced short pulses in excess of 1,000 pulses per second. A laser amplifier amplifies the second pulse train to produce an amplified pulse laser beam which is focused to produce pulses with brightness levels in excess of 10.sup.11 Watts/cm.sup.2. A preferred embodiment produces an amplified pulse laser beam having an average power in the range of 1 KW, an average pulse frequency of 12,000 pulses per second with pulses having brightness levels in excess of 10.sup.14 Watts/cm.sup.2 at a 20 .mu.m diameter spot which is steered rapidly to simulate a larger spot size. These beams are useful in producing X-ray sources for lithography.
As compared with prior art high brightness lasers, we have reduced the pulse duration by about 2 or 3 orders of magnitude, from a few ns to 100 ps or less. We achieve our very high brightness by focusing on a very small spot, but we are able to simulate a much larger spot by very rapidly steering our high average power beam over the area we need.

REFERENCES:
patent: 5003543 (1991-03-01), Morsell
patent: 5235606 (1993-08-01), Mouroll et al.
Xenakis et al., Laser-plasma x-ray generator using an injection-mode-locked-XeCl excimer Laser, 1 Jan. 1992.

Affiliated with

Also associated with

Rating

Low cost, high average power, high brightness solid state laser does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Low cost, high average power, high brightness solid state laser, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Low cost, high average power, high brightness solid state laser will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2421557