Low cost capacitive accelerometer

Details Low cost capacitive accelerometer Low cost capacitive accelerometer

1981-12-16

1984-03-06

Reynolds, B. A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73517R, G01P 15125, H01G 516

Patent

active

044357370

ABSTRACT:
A capacitive transducer is disclosed which provides a measurement of acceleration. The transducer includes a semiconductor element having a mass ring suspended from an elastic diaphragm which is retained by a support. The mass ring is formed to have opposed parallel planar surfaces, each of which are spaced adjacent a metal layer deposited on a glass substrate to form a capacitive circuit. The metal layers are configured in the shape as the flat surface of the mass ring and are coupled to provide an electrical output. The semiconductor element forms a common capacitor plate disposed between the two capacitor plates formed by the metal layers. Movement of the mass ring in response to acceleration causes a change in the spacing between the mass ring and metal layers thereby changing the capacitance and providing a measure of acceleration.

REFERENCES:
patent: 2963911 (1960-12-01), Courtney-Pratt et al.
patent: 4023413 (1977-05-01), Stauber
patent: 4077132 (1978-03-01), Erickson
patent: 4257274 (1981-03-01), Shimada et al.
patent: 4345299 (1982-08-01), Ho

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