Low contact electrical resistant composition, substrates coated

Details Low contact electrical resistant composition, substrates coated Low contact electrical resistant composition, substrates coated

1986-05-23

1988-09-27

Lesmes, George F.

Stock material or miscellaneous articles

Composite

Of inorganic material

428333, 428469, 20419214, 20419215, 20419217, 501102, 501134, B32B 900, C23C 1400

Patent

active

047741511

ABSTRACT:
A composition of a metallic compound represented by the formula MT, and G is provided by sputtering an M.sub.x G.sub.100-x target. M is a metal selected from the group of titanium, hafnium, zirconium, and mixtures thereof. T is selected from the group of N, C, and mixtures thereof. G is a metal selected from the group of gold, platinum, and palladium. X is an integer from about 65 to about 95. Also provided are substrates coated with the composition and process for depositing the composition on substrates.

REFERENCES:
patent: 3630872 (1971-12-01), Reichelt
patent: 3793175 (1974-02-01), Joly et al.
patent: 3829969 (1974-08-01), Fischbein et al.
patent: 4209375 (1980-06-01), Gates et al.
patent: 4419202 (1983-12-01), Gibson
patent: 4475983 (1984-10-01), Bader et al.
patent: 4535029 (1985-08-01), Intrater et al.
patent: 4599281 (1986-07-01), Schintlmeister
patent: 4643952 (1987-02-01), Kurakata

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