Gas separation: processes – With control responsive to sensed condition – Pressure sensed
Patent
1998-05-18
2000-08-29
Spitzer, Robert H.
Gas separation: processes
With control responsive to sensed condition
Pressure sensed
95 45, 95 95, 95106, 95133, 96 4, 96 10, 96113, 96144, 96147, B01D 5304
Patent
active
061102571
ABSTRACT:
A low concentration gas delivery system utilizing a sorbent-based gas storage and delivery unit including a gas storage and dispensing vessel joined in flow communication with a permeation structure. The storage and dispensing vessel contains a solid-phase physical sorbent medium holding a fluid, which is selectively dispensed from the vessel by pressure differential, concentration differential and/or thermal desorption techniques. The dispensed gas flows to the permeation structure, wherein the desorbed fluid is diffusionally released either as a neat fluid, or into a carrier gas in which the desorbed fluid has a precisely maintained concentration, for applications such as calibration of instruments monitoring fluid concentrations, delivery of dopants for fabrication of microelectronic device structures, or other end use application requiring a precise low concentration of fluid.
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Advanced Technology & Materials Inc.
Barrett William A.
Hultquist Steven J.
Spitzer Robert H.
Zitzmann Oliver A. M.
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