Low coherent interference fringe analysis method

Details Low coherent interference fringe analysis method Low coherent interference fringe analysis method

2006-10-10

2006-10-10

Lee, Hwa (Andrew) (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S511000

Reexamination Certificate

active

07119907

ABSTRACT:
In a low coherent interference fringe analysis method, a light intensity distribution of interference fringes formed by object light and reference light in a sample is represented by a light intensity distribution function using an envelope function. Subsequently, phase shifting is carried out, so as to measure the light intensity at each shift stage. According to thus measured light intensities at respective shift stages, unknowns of the light intensity distribution function are computed. Then, according to the computed unknowns, a peak position of a curve of the envelope function is determined. According to thus determined peak position, phase information of the sample is determined.

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patent: 6934035 (2005-08-01), Yang et al.

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