Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2005-11-29
2005-11-29
Lee, Andrew H. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
06970252
ABSTRACT:
Low-coherence interferometric device for light optical depth scanning of an object (13) positioned in front of a measurement aperture (12) of the device by detecting the position of light-reflecting sites which are located at different measurement depths within the object (13) along a scanning path (19) running into the object in a scanning direction (25) using a low-coherence interferometer which comprises a low-coherence light source (7), a beam splitter (8), a reference reflector (9) and a detector (10).The interferometer is a free-space in-line interferometer (6) having a beam splitter (8) running transversal to the direction of scanning (25). The light transmitter (7), the detector (10) and the reference mirror (9) are arranged on the side of the beam splitter facing away from the measurement aperture.A movable scanning lens (11) is arranged between the beam splitter (8) and the measurement aperture (12). The movable scanning lens (11) and the beam splitter (8) are movable for depth scanning in the same direction and in synchronization.
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Hackler Walter A.
Lee Andrew H.
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