Love-wave device including a thin film of TA or W

Details Love-wave device including a thin film of TA or W Love-wave device including a thin film of TA or W

1996-11-13

1998-12-08

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310360, H01L 4108

Patent

active

058474862

ABSTRACT:
An inexpensive Love-wave device having a wide frequency difference between its resonant and antiresonant frequencies includes a Y-cut substrate made from LiNbO.sub.3 for X propagation. An interdigital transducer including a thin film of Ta or W is located on the substrate for exciting a Love wave.

REFERENCES:
patent: 4381469 (1983-04-01), Ogawa et al.
patent: 4544857 (1985-10-01), Shimizu et al.
patent: 4672254 (1987-06-01), Dolat et al.
patent: 5153753 (1992-10-01), Ohta et al.
patent: 5380410 (1995-01-01), Sawaki et al.
patent: 5432392 (1995-07-01), Kadota et al.
patent: 5453652 (1995-09-01), Eda et al.

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