Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Reexamination Certificate
2006-04-25
2006-04-25
Porta, David (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
C359S386000
Reexamination Certificate
active
07034271
ABSTRACT:
A full-field imaging, long working distance, incoherent interference microscope suitable for three-dimensional imaging and metrology of MEMS devices and test structures on a standard microelectronics probe station. A long working distance greater than 10 mm allows standard probes or probe cards to be used. This enables nanometer-scale 3-dimensional height profiles of MEMS test structures to be acquired across an entire wafer while being actively probed, and, optionally, through a transparent window. An optically identical pair of sample and reference arm objectives is not required, which reduces the overall system cost, and also the cost and time required to change sample magnifications. Using a LED source, high magnification (e.g., 50×) can be obtained having excellent image quality, straight fringes, and high fringe contrast.
REFERENCES:
patent: 4978219 (1990-12-01), Bessho
patent: 5042949 (1991-08-01), Greenberg et al.
patent: 5127614 (1992-07-01), Etzold et al.
patent: 5973786 (1999-10-01), Yoon et al.
patent: 5995227 (1999-11-01), Velzel et al.
patent: 6172752 (2001-01-01), Haruna et al.
patent: 6208415 (2001-03-01), De Boer et al.
patent: 6226089 (2001-05-01), Hakamata
patent: 6522407 (2003-02-01), Everett et al.
patent: 6721094 (2004-04-01), Sinclair et al.
patent: 2003/0002048 (2003-01-01), Zanoni
M. Pluta, “Advanced Light Microscopy, vol. 3, Measuring Techniques”, PWN—Polish Scientific Publishers, 1993, pp. 328-341.
D. M. Gale, M. I. Pether, and J. C. Dainty, “Linnik Microscope Imaging of Integrated Circuit Structures”, Applied Optics, vol. 35, No. 1, Jan. 1996, pp 131-137.
W. Hemmert, M. S. Mermelstein and D. M. Freeman, “Nanometer Resolution of Three-Dimensional Motions Using Video Interference Microscopy”, Paper presented at the IEEE International MEMS 99, Orlando FL, Jan. 17-21, 1999.
“Molecular Expressions Microscopy Primer Anatomy of the Microscope”, http://micro.magnet.fsu,edu/primer/anatomy/objectives.html, Jan. 2001.
Guoqiang Li, Pang-Chen Sun, Paul C. Lin and Yeshayahu Fainman, “Interference Microscopy for Three-Dimensional Imaging with Wavelength-to-depth Encoding”, 2000.
De Boer Maarten P.
Sinclair Michael B.
Ko Tony
Porta David
Sandia Corporation
Watson Robert D.
LandOfFree
Long working distance incoherent interference microscope does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Long working distance incoherent interference microscope, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Long working distance incoherent interference microscope will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3623170