Long wavelength VCSEL bottom mirror

Coherent light generators – Particular resonant cavity – Distributed feedback

Reexamination Certificate

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C372S046012, C372S097000, C372S099000

Reexamination Certificate

active

06888873

ABSTRACT:
A vertical cavity surface emitting laser having an InP substrate and a lower mirror stack comprised of a plurality of alternating layers of AlPSb and GaPSb over the InP substrate. An InP spacer is over the lower mirror stack. An active region is over the InP spacer, and a tunnel junction is over the active region. Then a top mirror structure comprised of a low-temperature formed first GaAs buffer layer, a high-temperature formed second GaAs seed layer, an insulating structure having an opening, and a GaAs/Al(Ga)As mirror stack that is grown by lateral epitaxial overgrowth.

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