Long wavelength light emitting vertical cavity surface emitting

Details Long wavelength light emitting vertical cavity surface emitting Long wavelength light emitting vertical cavity surface emitting

1997-02-10

1998-11-10

Bovernick, Rodney

Coherent light generators

Particular resonant cavity

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372 50, H01S 319

Patent

active

058355219

ABSTRACT:
A longwavelength vertical cavity surface emitting laser (VCSEL) for use in optical telecommunications and method of fabrication that includes the fabrication of an active VCSEL structure on a supporting substrate and the fabrication of a highly reflective DBR mirror structure on a silicon substrate. The DBR mirror structure includes alternating layers of a silicon oxide material and a silicon material fabricated utilizing epitaxially growth techniques and/or wafer bonding using SOI wafer fusion technology. During fabrication of the final VCSEL device, the Si/SiO.sub.2 DBR mirror structure is wafer bonded to the active VCSEL structure. The active VCSEL structure supporting substrate is selectively removed, to enable positioning of a second DBR mirror stack. The final VCSEL device characterized by emitting infra-red light.

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