Coherent light generators – Particular active media – Gas
Reexamination Certificate
2007-11-13
2007-11-13
Nguyen, Dung (Michael) T. (Department: 2828)
Coherent light generators
Particular active media
Gas
C372S038100, C372S038020, C372S038040
Reexamination Certificate
active
10920552
ABSTRACT:
A long pulse pulse power system for gas discharge lasers. The system includes a sustainer capacitor for accepting a charge from a high voltage pulse power source. A peaking capacitor with a capacitance value of less than half the sustainer capacitance provides the high voltage for the laser discharge.
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Hofmann Thomas
Johanson Bruce D.
Cray William
Cymer Inc.
Nguyen Dung (Michael) T.
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