Long-laser-pulse method of producing thin films

Superconductor technology: apparatus – material – process – High temperature – per se – Having tc greater than or equal to 150 k

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505732, 505730, 427 62, 427 531, 427 541, 427314, B05D 306, B05D 512

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050195522

ABSTRACT:
A method of depositing thin films by means of laser vaporization employs a long-pulse laser (Nd-glass of about one millisecond duration) with a peak power density typically in the range 10.sup.5 -10.sup.6 W/cm.sup.2. The method may be used to produce high T.sub.c superconducting films of perovskite material. In one embodiment, a few hundred nanometers thick film of YBa.sub.2 Cu.sub.3 O.sub.7-x is produced on a SrTiO.sub.3 crystal substrate in one or two pulses. In situ-recrystallization and post-annealing, both at elevated temperature and in the presence of an oxidizing agen

REFERENCES:
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Witanachchi et al., "Deposition of Superconducting Y-Ba-Cu-O Films at 400.degree. C. without Post-Annealing", Appl. Phys. Lett. 53(3), Jul. 1988, pp. 234-236.
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