Active solid-state devices (e.g. – transistors – solid-state diode – Gate arrays – With particular power supply distribution means
Patent
1997-07-14
1998-12-08
Hardy, David B.
Active solid-state devices (e.g., transistors, solid-state diode
Gate arrays
With particular power supply distribution means
257202, H01L 2710
Patent
active
058474218
ABSTRACT:
There are provided a semiconductor device, basic cell library, a method for manufacturing a semiconductor device, and a method and mask for forming a basic cell library which can reduce the amount of poly-data to be corrected by the optical proximity effect correction (OPC), reduce the CAD processing time, perform correction by the OPC for each cell, and reduce the product turn around time. A basic cell registered in the basic cell library has a dummy wiring pattern previously formed on the peripheral portion thereof. With this structure, the distance between a polysilicon gate used in a circuit and the polysilicon wiring of an adjacent dummy wiring pattern in the basic cell can be determined in the cell. As a result, variations in the poly-widths of all of the polysilicon gates in the basic cell due to the optical proximity effect can be estimated, and therefore, a correction value by the OPC on a mask for correcting the gate width based on the variation in the poly-width can be determined in the cell.
REFERENCES:
patent: 5066997 (1991-11-01), Sakurai et al.
patent: 5441915 (1995-08-01), Lee
patent: 5534724 (1996-07-01), Nagamine
patent: 5553273 (1996-09-01), Liebmann
patent: 5663017 (1997-09-01), Schinella et al.
patent: 5682323 (1997-10-01), Pasch et al.
patent: 5705301 (1998-01-01), Garza et al.
patent: 5723233 (1998-03-01), Garza et al.
Hardy David B.
Kabushiki Kaisha Toshiba
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