Lockdown rotor for a processing machine

Details Lockdown rotor for a processing machine Lockdown rotor for a processing machine

2006-10-31

2006-10-31

Scherbel, David A. (Department: 3752)

Drying and gas or vapor contact with solids

Apparatus

With apparatus using centrifugal force

C034S109000, C034S312000, C034S317000, C034S328000, C034S315000

Reexamination Certificate

active

07127828

ABSTRACT:
A rotor that may be used by itself or in a processing machine for processing semiconductor wafers includes two pairs of combs. A lock down mechanism has a lock bar, temporarily engaged and moved by a loading/unloading robot, drives a retainer against the edges of the wafers, to better hold them in place during processing. Contamination via generation of particles is reduced. Combs on the rotor have a resilient strip. The lower edges of the wafers compress slightly into or deflect the resilient strip, when urged into place by the lock down mechanism.

REFERENCES:
patent: 4300581 (1981-11-01), Thompson
patent: 4568234 (1986-02-01), Lee et al.
patent: 5000208 (1991-03-01), Ludwig et al.
patent: 5174045 (1992-12-01), Thompson et al.
patent: 5232328 (1993-08-01), Owczarz et al.
patent: 5339539 (1994-08-01), Shiraishi et al.
patent: 5452795 (1995-09-01), Gallagher et al.
patent: 5544421 (1996-08-01), Thompson et al.
patent: 5664337 (1997-09-01), Davis et al.
patent: 5784797 (1998-07-01), Curtis et al.
patent: 5890597 (1999-04-01), Fan et al.
patent: 6125551 (2000-10-01), Bushong et al.
patent: 06177111 (1994-06-01), None
patent: 06232111 (1994-08-01), None
patent: 08045895 (1996-02-01), None

Affiliated with

Also associated with

Rating

Lockdown rotor for a processing machine does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Lockdown rotor for a processing machine, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lockdown rotor for a processing machine will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3652028