Lockable container for transporting and for storing semiconducto

Details Lockable container for transporting and for storing semiconducto Lockable container for transporting and for storing semiconducto

1989-03-13

1991-06-18

Fidei, David T.

Special receptacle or package

For plate or sheet

Fragile or sensitive

206328, 206334, 141 98, B65D 104

Patent

active

050243292

ABSTRACT:
A container for transporting and for storing semiconductor wafers situated in processing cassettes comprises a bottom plate, a hood, a locking lever and a seal element that is provided between the hood and the bottom plate. In order to avoid contamination of the semiconductor wafers during transport and during storage, the container is of such a nature that it is particle-tight and itself releases only a minimum of particles. The semiconductor wafer securing arrangement is movable on the basis of film hinges and is mechanically moved by the bottom plate when opening and closing the container, whereby no sliding friction occurs.

REFERENCES:
patent: 3814274 (1974-06-01), McIntosh
patent: 4091948 (1978-05-01), Northup
patent: 4582219 (1986-04-01), Mortensen et al.
patent: 4609103 (1986-09-01), Bimer et al.
patent: 4739882 (1988-04-01), Parikh et al.
patent: 4804086 (1989-02-01), Grohrock
patent: 4830182 (1989-05-01), Nakazato et al.
patent: 4842136 (1989-06-01), Nakazato et al.
Document #1332, "Standard Mechanical Interface for Wafer Cassette Transfer", Semiconductor Equipment and Materials Institute, Inc., Jan. 10, 1986.
SMIF-Pod, "The Nucleus of the ASYST-SMIF System", and ASYST SMIF-POD System Specifications, Asyst Technologies.

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