Location monitoring of wafer batches

Details Location monitoring of wafer batches Location monitoring of wafer batches

1995-06-08

1998-06-23

Pitts, Harold

Registers

Systems controlled by data bearing records

Operations analysis

235375, 235380, G06F 1546

Patent

active

057708428

ABSTRACT:
A wafer cassette for storing, transporting and processing a plurality of wafers has a versatile adapter for removably receiving and attaching a transponder device to any convenient, predetermined surface location on the wafer cassette. The apparatus including the versatile adapter allows the wafer cassette to be used with a wide variety of processing equipment and fixtures without modification or customization, in contrast to similar apparatus known in the art.

REFERENCES:
patent: 4500080 (1985-02-01), Aigo
patent: 4827110 (1989-05-01), Rossi et al.
patent: 4833306 (1989-05-01), Milbrett
patent: 4888473 (1989-12-01), Rossi et al.

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