Local surface analysis

Details Local surface analysis Local surface analysis

1975-06-20

1977-01-04

Church, Craig E.

Radiant energy

Ionic separation or analysis

With sample supply means

250309, 250423P, 250423R, H01J 3726

Patent

active

040015823

ABSTRACT:
In an apparatus for local surface analysis of a target sample in which an ion probe is directed to the target for sputtering particles. A chamber having walls heated to a high temperature (above 2200.degree. K as a rule) collects sputtered particles. The particles entering the chamber are subjected to successive adsorptions and desorptions before they leave the chamber for entry into a mass spectrometer. Scanning may be provided as in conventional SIMS systems.

REFERENCES:
patent: 3355615 (1967-11-01), Bihan
patent: 3660655 (1972-05-01), Wardell
patent: 3770954 (1973-11-01), Davis
patent: 3864575 (1975-02-01), Hashmi

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