Loading and unloading unit for polishing apparatus

Details Loading and unloading unit for polishing apparatus Loading and unloading unit for polishing apparatus

1996-07-08

1998-07-14

Werner, Frank E.

Material or article handling

Apparatus for charging a load holding or supporting element...

Load holding or supporting element including gripping means

451331, 29 9001, 269 55, 414736, 414763, B24B 4702

Patent

active

057794260

ABSTRACT:
A polishing apparatus has a turntable and a top ring for gripping a semiconductor wafer to be polished by an abrasive cloth on the turntable. The polishing apparatus incorporates a loading and unloading unit having a supply holder for holding and supplying a semiconductor wafer to be polished to the top ring at a transfer position, and a reception holder for receiving a polished semiconductor wafer from the top ring at the transfer position. The reception holder and the supply holder are mounted on respective opposite ends of a support block which is angularly movable in a vertical plane by a turning mechanism for moving the supply holder and the reception holder alternatively to the transfer position.

REFERENCES:
patent: 4205427 (1980-06-01), Koch et al.
patent: 4558506 (1985-12-01), Kielma
patent: 4915564 (1990-04-01), Eror et al.
patent: 5135349 (1992-08-01), Lorenz et al.

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