Load sensors

Details Load sensors Load sensors

1983-02-08

1985-03-12

Rowland, James L.

Measuring and testing

Dynamometers

Responsive to force

73DIG1, G01L 110

Patent

active

045037159

ABSTRACT:
An electro-mechanical load sensor is in the form of a mechanical resonant system with electrostatically coupled electrodes. The mechanical system is formed from a silicon wafer by a selective etching process and comprises a filament of between two terminations 12 and 13 carrying transverse plates M.sub.1 and M.sub.2. Electrostatic (capacitive) coupling to plate electrodes E.sub.1, E.sub.2, E.sub.3 in a self-exciting circuit drives the system. The resonant frequency for angular S vibrations with plates M.sub.1 and M.sub.2 in anti-phase varies with applied load L and is thus a measure of this load.

REFERENCES:
patent: 3101001 (1963-08-01), Appleton
patent: 3257850 (1966-06-01), Koorman
patent: 3327533 (1967-06-01), Koorman

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