Load sensor using a piezoelectric S.A.W. device

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

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Details

310338, 73703, 73778, 73DIG4, 177210FP, H01L 4108

Patent

active

046238131

ABSTRACT:
A load sensor includes a fixed rigid portion, a movable rigid portion spaced from the fixed rigid portion and adapted to receive an applied load, and a shear-deformable member provided between the two rigid portions. The shear-deformable portion is provided with a transmission and a reception transducer constituting an elastic surface-wave oscillator. When a load is applied to the movable rigid portion, weight is sensed based on a deviation in the oscillation frequency of the elastic surface-wave oscillator. The fixed and movable rigid portions, as well as upper and lower beams interconnecting these portions, constitute a load-sensitive element. The latter has a side face which is closed off by a pliable membrane for sealing the shear-deformable element disposed within the load-sensitivie element. Alternatively, a corrugated bellows is connected across the fixed and movable rigid portions to seal the shear-deformable member within the bellows.

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patent: 4096740 (1978-06-01), Sallee
patent: 4107626 (1978-08-01), Kiewit
patent: 4151502 (1979-04-01), Kurihara
patent: 4295102 (1981-10-01), Schmidt et al.
patent: 4333342 (1982-06-01), Gilden et al.
patent: 4512198 (1985-04-01), Sinha

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