Load sensor and its manufacturing method

Details Load sensor and its manufacturing method Load sensor and its manufacturing method

2004-10-28

2008-07-08

Enad, Elvin (Department: 2832)

Electrical resistors

Strain gauge type

Reexamination Certificate

active

07397340

ABSTRACT:
A load sensor includes a substrate, a glass layer provided on the substrate, a wiring provided on the glass layer, an adjusting layer provided on the glass layer, and a strain-sensitive resistor element provided on the adjusting layer and connected to the wiring. A thermal expansion coefficient of the adjusting layer is closer to that of the strain-sensitive resistor element than that of the glass layer. In this load sensor, a stress remaining inside the resistor element is reduced, and the change over time of the resistance of the element is accordingly suppressed. Therefore, a single kind of the resistor element can be formed on substrates having respective thermal expansion coefficients, shapes, and thicknesses, thereby providing various load sensors having respective specifications.

REFERENCES:
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European Search Report issued in corresponding European Patent Application No. EP 04793090.4-1236, dated Aug. 23, 2007.

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