Load port mounting mechanism

Details Load port mounting mechanism Load port mounting mechanism

2005-04-26

2005-04-26

Baxter, Gwendolyn (Department: 3632)

Supports

With means to facilitate installation, repair, or...

C248S222130

Reexamination Certificate

active

06883770

ABSTRACT:
A positioning member and a movable member that is to be brought into contact with the positioning member are arranged in one and the other of the load port and the semiconductor manufacture apparatus, respectively. Two pairs of such positioning members and movable members are provided. A groove (preferably V-shaped) into which the movable member is to be fitted is provided in a surface of one of the positioning member that contacts with the movable member. Furthermore, a mechanism for making it possible to adjust the position by moving the movable member in an up-and-down direction is provided to adjust the position of the movable member to thereby make it possible to perform the positional adjustment between the semiconductor manufacture apparatus and the load port. In a preferred embodiment, the positioning member is a roller which may rotate about its own shaft.

REFERENCES:
patent: 4337988 (1982-07-01), Schenck
patent: 4607896 (1986-08-01), Peterman
patent: 6082951 (2000-07-01), Nering et al.
patent: 6138721 (2000-10-01), Bonora et al.
patent: 6220808 (2001-04-01), Bonora et al.
patent: 405074923 (1993-03-01), None
patent: 405090385 (1993-04-01), None

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