Load-lock system, exposure processing system, and device...

Details Load-lock system, exposure processing system, and device... Load-lock system, exposure processing system, and device...

2007-10-02

2007-10-02

Savage, Matthew (Department: 1724)

Gas separation

Combined or convertible

In environmental air enclosure

C055S385600, C096S125000, C454S057000, C454S187000, C156S345310, C156S345320, C118S052000, C118S066000, C118S719000, C118S725000, C438S716000

Reexamination Certificate

active

10809021

ABSTRACT:
A load-lock system includes a load-lock chamber arranged between a storage port which stores a substrate and a process chamber which processes the substrate in a process space maintained at a pressure lower than that in the storage port, and a dehumidifying unit which forms a dehumidified environment in the load-lock chamber. A system preferably includes another chamber between said storage port and said load-lock chamber, wherein said dehumidifying unit dehumidifies said another chamber.

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U.S. Appl. No. 09/691,068, filed Mar. 19, 2004, Edo.

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