Load lock chamber, processing system

Details Load lock chamber, processing system Load lock chamber, processing system

2007-06-26

2007-06-26

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C355S075000, C355S077000, C414S935000, C414S938000, C414S939000

Reexamination Certificate

active

10794499

ABSTRACT:
A load lock chamber provided between a port that accommodates an object to be processed and is maintained at an ambient pressure, and a process chamber that is maintained at a reduced pressure or vacuum environment and performs a predetermined process for the object, said load lock chamber replacing an atmosphere in said load lock chamber and delivering the object between the port and the process chamber includes a first load lock chamber that includes a first holder for holding the object received from the port, and a second load lock chamber that includes a second holder for holding the object received from the process chamber, wherein the first holder holds more objects than the second holder.

REFERENCES:
patent: 5248886 (1993-09-01), Asakawa et al.
patent: 5303671 (1994-04-01), Kondo et al.
patent: 5943230 (1999-08-01), Rinnen et al.
patent: 6805748 (2004-10-01), Edo
patent: 2003/0015290 (2003-01-01), Edo
patent: 04-277025 (1992-10-01), None
patent: 06-318536 (1994-11-01), None
patent: 7-142408 (1995-06-01), None
patent: 09-085076 (1997-03-01), None
patent: 2001-118904 (2001-04-01), None
patent: 2003-31639 (2003-01-01), None
English Translation of JP 7-142408 (dated Jun. 2, 1995).

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