Fluent material handling – with receiver or receiver coacting mea – With material treatment – Heating or cooling
Reexamination Certificate
2006-04-14
2009-12-01
Maust, Timothy L (Department: 3751)
Fluent material handling, with receiver or receiver coacting mea
With material treatment
Heating or cooling
C141S011000, C141S098000, C118S725000, C156S345310
Reexamination Certificate
active
07624772
ABSTRACT:
A load lock apparatus including a carry port provided on a side of a carry-in/out section for carrying a substrate in/out from/to the outside, and a carry port provided on a side of a processing section for processing the substrate, includes: a temperature controlling plate for controlling a temperature of the substrate, the temperature controlling plate configured including a plate body made of a porous material and a temperature controlling gas supply path for supplying a temperature controlling gas controlled in temperature to the plate body. The temperature controlling gas passes through the plate body, blows out from a surface of the plate body, and is supplied to the substrate.
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Maust Timothy L
Niesz Jason K
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tokyo Electron Limited
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