Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2005-12-23
2008-10-21
Connolly, Patrick (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C250S23700G
Reexamination Certificate
active
07440113
ABSTRACT:
An apparatus and method for measuring displacement includes a light beam directed to an interferometer core that splits the light beam into first and second component beams. The first component beam is directed to a diffraction grating at approximately a Littrow angle. A diffraction is received by the interferometer core and is combined with the second component beam. The combination of the first and second component beams is measured to determine displacement of the diffraction grating.
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Cutler Leonard S
Johnstone Eric Stephen
Owen Geraint
Prince James
Ray Alan B
Agilent Technologie,s Inc.
Bouscaren June L.
Connolly Patrick
Richey Scott M
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