Lithography tool with vibration isolation

Details Lithography tool with vibration isolation Lithography tool with vibration isolation

1995-05-03

1996-04-16

Anderson, Bruce C.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

378 34, G21G 500

Patent

active

055085180

ABSTRACT:
The optical components of an imaging or exposure tool are isolated from vibrations emanating from components such as vacuum pumps, stage drives, and substrate translating and handling components, by connecting all sources of vibrations to the frame, and suspending the optical components from the frame using isolating and damping components. Connections to portions of the optical components are made using high vacuum, heavily damped, bellows type connectors, or the like.

REFERENCES:
patent: 4352643 (1982-10-01), Iijima
patent: 4803712 (1989-02-01), Kembo et al.
patent: 4952858 (1990-08-01), Galburt
patent: 5308036 (1994-05-01), Olson et al.

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