Lithography system employing a solid immersion lens

Details Lithography system employing a solid immersion lens Lithography system employing a solid immersion lens

1991-03-14

1992-06-09

Ben, Loha

Optical: systems and elements

Lens

Spherical

359661, 359508, 359356, 2504922, G02B 702

Patent

active

051212560

ABSTRACT:
A lithography system employing a solid immersion lens having a spherical surface to enhance its resolution is disclosed.

REFERENCES:
patent: 3556659 (1971-01-01), Hawes
patent: 4634234 (1987-01-01), Baumann
patent: 5032011 (1991-07-01), Muchel

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