Lithography system

Photocopying – Projection printing and copying cameras – Illumination systems or details

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C355S053000, C250S492200

Reexamination Certificate

active

07612866

ABSTRACT:
A maskless lithography system for transferring a pattern onto the surface of a target. At least one beam generator for generating a plurality of beamlets. A plurality of modulators modulate the magnitude of a beamlet, and a control unit controls of the modulators. The control unit generates and delivers pattern data to the modulators for controlling the magnitude of each individual beamlet. The control unit includes at least one data storage for storing the pattern data, at least one readout unit for reading out the data from the data storage, at least one data converter for converting the data that is read out from the data storage into at least one modulated light beam, and at least one optical transmitter for transmitting the at least one modulated light beam to the modulation modulators.

REFERENCES:
patent: 5691541 (1997-11-01), Ceglio et al.
patent: 6014200 (2000-01-01), Sogard et al.
patent: 6251550 (2001-06-01), Ishikawa
patent: 6312134 (2001-11-01), Jain et al.
patent: 6379867 (2002-04-01), Mei et al.
patent: 6724002 (2004-04-01), Mankos et al.
patent: 6828574 (2004-12-01), Allen
patent: 2001/0004185 (2001-06-01), Muraki et al.
patent: 2001/0028043 (2001-10-01), Hamaguchi et al.
patent: 2002/0145113 (2002-10-01), Sullivan et al.
patent: 2004/0124372 (2004-07-01), Gil et al.
patent: WO 91/10170 (1991-07-01), None
patent: WO 00/60632 (2000-10-01), None
patent: WO 01/35165 (2001-05-01), None

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Lithography system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Lithography system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lithography system will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4108600

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.