Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2007-11-01
2009-11-03
Lee, Diane I (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000, C250S492200
Reexamination Certificate
active
07612866
ABSTRACT:
A maskless lithography system for transferring a pattern onto the surface of a target. At least one beam generator for generating a plurality of beamlets. A plurality of modulators modulate the magnitude of a beamlet, and a control unit controls of the modulators. The control unit generates and delivers pattern data to the modulators for controlling the magnitude of each individual beamlet. The control unit includes at least one data storage for storing the pattern data, at least one readout unit for reading out the data from the data storage, at least one data converter for converting the data that is read out from the data storage into at least one modulated light beam, and at least one optical transmitter for transmitting the at least one modulated light beam to the modulation modulators.
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Jager Remco
Kruit Pieter
van't Spijker Johannes Christiaan
Wieland Jan-Jaco Marco
Blakely , Sokoloff, Taylor & Zafman LLP
Lee Diane I
Mapper Lithography IP B.V.
Whitesell-Gordon Steven H
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