Lithography device

Photocopying – Projection printing and copying cameras – Illumination systems or details

Reexamination Certificate

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Details

C355S069000

Reexamination Certificate

active

10888284

ABSTRACT:
A lithography device including a first revolver, a second revolver and a driving device. The first revolver includes a transmittance control filter. The second revolver includes transmittance profile filter. The driving device is capable of rotating the second revolver. The first revolver is for positioning the at least one transmittance control filter in the light path. The second revolver is for positioning the at least one transmittance profile filters in the light path.

REFERENCES:
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patent: 6396567 (2002-05-01), Chu et al.
patent: 6404499 (2002-06-01), Stoeldraijer et al.
patent: 6476905 (2002-11-01), Li
patent: 6563567 (2003-05-01), Komatsuda et al.
patent: 6737662 (2004-05-01), Mulder et al.
patent: 2004/0012764 (2004-01-01), Mulder et al.
patent: 09-266159 (1997-10-01), None
patent: 1998-080158 (1998-11-01), None
patent: 2001-85493 (2001-09-01), None
patent: 1020030024638 (2003-03-01), None
English Language Abstract of Japan Publication No. 09-266159.
English Language Abstract of Korean Publication No. 1020030024638 A.
English language abstract of Korean Publication No. 2001-85493.
English language abstract of Korean Publication No. 1998-080158.

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