Lithography device

Details Lithography device Lithography device

2007-03-27

2007-03-27

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S069000

Reexamination Certificate

active

10888284

ABSTRACT:
A lithography device including a first revolver, a second revolver and a driving device. The first revolver includes a transmittance control filter. The second revolver includes transmittance profile filter. The driving device is capable of rotating the second revolver. The first revolver is for positioning the at least one transmittance control filter in the light path. The second revolver is for positioning the at least one transmittance profile filters in the light path.

REFERENCES:
patent: 5712698 (1998-01-01), Poschenrieder et al.
patent: 6396567 (2002-05-01), Chu et al.
patent: 6404499 (2002-06-01), Stoeldraijer et al.
patent: 6476905 (2002-11-01), Li
patent: 6563567 (2003-05-01), Komatsuda et al.
patent: 6737662 (2004-05-01), Mulder et al.
patent: 2004/0012764 (2004-01-01), Mulder et al.
patent: 09-266159 (1997-10-01), None
patent: 1998-080158 (1998-11-01), None
patent: 2001-85493 (2001-09-01), None
patent: 1020030024638 (2003-03-01), None
English Language Abstract of Japan Publication No. 09-266159.
English Language Abstract of Korean Publication No. 1020030024638 A.
English language abstract of Korean Publication No. 2001-85493.
English language abstract of Korean Publication No. 1998-080158.

Affiliated with

Also associated with

Rating

Lithography device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Lithography device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lithography device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3734651