Photocopying – Projection printing and copying cameras
Reexamination Certificate
2006-08-08
2006-08-08
Nguyen, Kiet T. (Department: 2881)
Photocopying
Projection printing and copying cameras
C355S053000, C355S067000
Reexamination Certificate
active
07088419
ABSTRACT:
An optical lithography system that has extended depth of focus exposes a photoresist coating on a wafer, and includes an illumination sub-system, a reticle, and an imaging lens that has a pupil plane function to form an aerial image of the reticle proximate to the photoresist. The pupil plane function provides the extended depth of focus such that the system may be manufactured or used with relaxed tolerance, reduced cost and/or increased throughput. The system may be used to form precise vias within integrated circuits even in the presence of misfocus or misalignment.
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Cathey, Jr. Wade Thomas
Dowski, Jr. Edward Raymond
Johnson Gregory E.
Kubala Kenneth S.
CDM Optics, Inc.
Lathrop & Gage LC
Nguyen Kiet T.
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