Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2006-09-18
2011-11-01
Glick, Edward (Department: 2882)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000, C355S077000, C716S053000, C716S054000, C716S055000
Reexamination Certificate
active
08049865
ABSTRACT:
A lithographic system comprises an array of individually controllable elements, a projection system, datapath hardware, and a conversion system. The array of individually controllable elements is capable of modulating a radiation beam. The projection system is configured to project the modulated radiation beam onto a target portion of a substrate. The datapath hardware converts an input pattern file into a control signal for controlling the array of individually controllable elements. The conversion system is configured to convert a requested device layout pattern into an input pattern file for the datapath hardware. The input pattern file is a spatial-frequency-restricted representation of the requested device layout pattern.
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Mulckhuyse Wouter Frans Willem
Tinnemans Patricius Aloysius Jacobus
ASML Netherlands B.V.
Glick Edward
Kreutzer Colin
Sterne, Kessler, Goldstein & Fox P.L.L.C
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