Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate
2006-10-03
2006-10-03
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Focus or magnification control
C355S053000
Reexamination Certificate
active
07116401
ABSTRACT:
A lithographic projection apparatus according to an embodiment of the invention includes a measurement system configured to determine a position of a target portion of a substrate, using at least one among an optical sensing operation and an optical detecting operation. The position is determined via an optical path that includes at least one catoptrical system arranged to have an imaging function of at least one dioptrical element.
REFERENCES:
patent: 4475223 (1984-10-01), Taniguchi et al.
patent: 4540277 (1985-09-01), Mayer
patent: 4999669 (1991-03-01), Sakamoto et al.
patent: 5144363 (1992-09-01), Wittekoek
patent: 5191200 (1993-03-01), van der Werf et al.
patent: 5416562 (1995-05-01), Ota et al.
patent: 5621497 (1997-04-01), Terasawa et al.
patent: 5640227 (1997-06-01), Kato et al.
patent: 5673135 (1997-09-01), Yoshino et al.
patent: 5715064 (1998-02-01), Lin
patent: 5748323 (1998-05-01), Levinson
patent: 5917580 (1999-06-01), Ebinuma et al.
patent: 5969441 (1999-10-01), Loopstra et al.
patent: 6080990 (2000-06-01), Watanabe et al.
patent: 6208407 (2001-03-01), Loopstra
patent: 6498351 (2002-12-01), Kruizinga
patent: 2001/0013936 (2001-08-01), Nielsen et al.
patent: 0467445 (1992-01-01), None
patent: WO 98/39689 (1998-09-01), None
patent: WO 99/28790 (1999-06-01), None
patent: WO 99/32940 (1999-07-01), None
patent: 0951054 (1999-10-01), None
patent: 61196532 (1986-08-01), None
patent: 4179115 (1992-06-01), None
Bruinsma Anastasius Jacobus Anicetus
Hoogendam Christiaan Alexander
Nijmeijer Gerrit Johannes
Vanneer Roeland Nicolaas Maria
ASML Netherlands B.V.
Kim Peter B.
Pilsbury Winthrop Shaw Pittman LLP
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