Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-08-08
2006-08-08
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S067000, C355S071000, C250S492200
Reexamination Certificate
active
07088424
ABSTRACT:
A lithographic projection apparatus includes a radiation system configured to form a beam of radiation from radiation emitted by a radiation source, as well as a support configured to hold a patterning device, which when irradiated by the beam of radiation provides the beam of radiation with a pattern. A substrate table is configured to hold a substrate, and a projection system is configured to image an irradiated portion of the patterning device onto a target portion of the substrate. The radiation system further includes an aperture at a distance from the optical axis, a reflector which is placed behind the aperture when seen from the source and a structure placed in a low radiation intensive region behind the aperture.
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Bakker Levinus Pieter
Jonkers Jeroen
Schuurmans Frank Jeroen Pieter
Visser Hugo Matthieu
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Rutledge D.
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