Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2004-09-30
2008-09-02
Mathews, Alan A (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000, C359S360000, C359S838000
Reexamination Certificate
active
07420653
ABSTRACT:
A lithographic projection apparatus includes a radiation system configured to provide a beam of radiation; a support configured to support a patterning device, the patterning device configured to pattern the beam according to the desired pattern; a substrate table configured to hold a substrate; and a projection system configured to project the patterned beam onto a target portion of the substrate. A component of the lithographic projection apparatus is at least partially provided with a cap layer that includes aluminum nitride.
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Oestreich et al., “Multilayer reflectance during exposure to EUV radiation,”Proceedings of SPIE4146:64-71 (2000).
ASML Netherlands B.V.
Mathews Alan A
Pillsbury Winthrop Shaw & Pittman LLP
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