Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2007-08-14
2007-08-14
Kim, Robert (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
C250S492200, C378S034000, C378S035000, C355S030000
Reexamination Certificate
active
11224084
ABSTRACT:
A lithographic projection apparatus includes reflector assembly, a foil trap, and a housing that is constructed and arranged to contain the reflector assembly and the foil trap. The reflector assembly is connected to the housing via a first wall, and the foil trap is connected to the housing via a second wall. The apparatus also includes a chamber between the foil trap and the reflector assembly. The chamber is defined by the housing, the first wall, and the second wall. The apparatus further includes a pump that is configured to create a vacuum in the chamber.
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Bakker Levinus Pieter
Schuurmans Frank Jeroen Pieter
ASML Netherlands B.V.
Kim Robert
Leybourne James J.
Pillsbury Winthrop Shaw & Pittman LLP
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