Photocopying – Projection printing and copying cameras – Methods
Reexamination Certificate
2008-06-16
2009-12-01
Nguyen, Hung Henry (Department: 2851)
Photocopying
Projection printing and copying cameras
Methods
C355S053000, C355S052000
Reexamination Certificate
active
07626684
ABSTRACT:
A lithographic projection apparatus is disclosed that includes a predictive system configured to predict changes in projection system aberrations with time with respect to measured aberration values, a modelling system configured to determine an application-specific effect of said predicted projection system aberration changes on at least one parameter of an image for a selected pattern, a control system configured to generate a control signal specific to the selected pattern according to said predicted projection system aberration changes and their application-specific effect on the at least one parameter of the image, and an image adjusting system, responsive to the control signal, to compensate for the application-specific effect of said predicted projection system aberration changes on the image.
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European Search Report issued for European Patent Application No. 05105767.7-2222, dated Jan. 3, 2006.
Akhssay M'hamed
Baselmans Johannes Jacobus Matheus
Commissaris Franciscus Antonius Chrysogonus Marie
De Groot Simon
Jeunink Andre Bernardus
ASML Netherlands B.V.
Nguyen Hung Henry
Pillsbury Winthrop Shaw & Pittman LLP
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