Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2004-07-08
2008-07-22
Nguyen, Hung Henry (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S052000
Reexamination Certificate
active
07403264
ABSTRACT:
A lithographic projection apparatus is disclosed that includes a predictive system configured to predict changes in projection system aberrations with time with respect to measured aberration values, a modelling system configured to determine an application-specific effect of said predicted projection system aberration changes on at least one parameter of an image for a selected pattern, a control system configured to generate a control signal specific to the selected pattern according to said predicted projection system aberration changes and their application-specific effect on the at least one parameter of the image, and an image adjusting system, responsive to the control signal, to compensate for the application-specific effect of said predicted projection system aberration changes on the image. Adjustments may therefore be determined optimally for a given application.
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European Search Report issued for European Patent Application No. 05105767.7—2222, dated Jan. 3, 2006.
Akhssay M'hamed
Baselmans Johannes Jacobus Matheus
Commissaris Franciscus Antonius Chrysogonus Marie
De Groot Simon
Jeunink Andre Bernardus
ASML Netherlands B.V.
Nguyen Hung Henry
Pillsbury Winthrop Shaw & Pittman LLP
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