Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2006-01-17
2006-01-17
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000, C356S400000, C356S401000, C250S548000
Reexamination Certificate
active
06987556
ABSTRACT:
Alignment to buried marks is carried out by using electromagnetic radiation to induce waves in the layers covering the buried layer. The acoustic or thermal waves cause reflectivity changes and displacements in the surface whose position and/or time dependence reveals the true position of the buried alignment mark. The buried alignment mark may be revealed by mapping the thickness of covering layers in its vicinity, e.g. by measuring the time dependence of the decay of a standing wave induced in the covering layers or by measuring the delay time of echoes of a travelling wave created at interfaces between different ones of the covering layers. Alternatively, a travelling wave can be created over the whole area of the mark so that echoes off the top and bottom of the buried mark carry positive and negative images of the mark; these cause reflectivity differences and displacements when they reach the surface which can be aligned to.
REFERENCES:
patent: 4862008 (1989-08-01), Oshida et al.
patent: 5004925 (1991-04-01), Takahashi et al.
patent: 5532091 (1996-07-01), Mizutani
patent: 5569929 (1996-10-01), Mizutani et al.
patent: 6285455 (2001-09-01), Shiraishi
patent: 6320242 (2001-11-01), Takasu et al.
patent: 2001/0007734 (2001-07-01), Yoshida et al.
patent: 10-340840 (1998-12-01), None
patent: WO 99/56077 (1999-11-01), None
J.A. Rogers et al., “A New Photoacoustic/Photothermal Device for Real-Time Materials Evaluation: An Automated means for Performing Transient Grating Experiments”, PHYSICA B vols. 219 & 220 (1996), pp 562-564.
Lisa Dhar et al., “Moduli Determination in Polyimide Film Bilayer Systems: Prospects for Depth Profiling Using Impulsive Stimulated Thermal Scattering”, J. Applied Physics vol. 77. No. 9, May 1, 1995, pp 4431-4444.
R. Logan et al., “Microelectronic Film Thickness Determination Using a Laser-Based Ultrasonic Technique”, Materials Research Society Symposium PROC. vol. 440, vol. 1997.
Mos Everhardus C.
Setija Irwan D.
van der Schaar Maurits
ASML Netherlands B.V.
Kim Peter B.
Pillsbury & Winthrop LLP
LandOfFree
Lithographic projection apparatus, a method for determining... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Lithographic projection apparatus, a method for determining..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lithographic projection apparatus, a method for determining... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3527466