Photocopying – Projection printing and copying cameras – With developing
Reexamination Certificate
2008-07-22
2008-07-22
Mathews, Alan A (Department: 2851)
Photocopying
Projection printing and copying cameras
With developing
C355S053000, C396S611000, C438S014000, C438S016000, C700S121000
Reexamination Certificate
active
07403259
ABSTRACT:
A rework station and a metrology device(s) are incorporated into a lithographic processing cell so that a faulty substrate can be reworked directly and reprocessed without, for example, an overhead involved in changing masks, etc.
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De Leeuw Rard Willem
Kruijswijk Stefan Geerte
Luehrmann Paul Frank
Tel Wim Tjibbo
Troost Kars Zeger
ASML Netherlands B.V.
Mathews Alan A
Pillsbury Winthrop Shaw & Pittman LLP
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