Lithographic process having improved image quality

Details Lithographic process having improved image quality Lithographic process having improved image quality

1987-06-01

1990-02-20

Berman, Jack I.

Radiant energy

Irradiation of objects or material

2504922, 430 5, 355 71, 355125, G03F 720

Patent

active

049028995

ABSTRACT:
A lithographic process having improved image quality by employing a mask that includes a plurality of opaque elements or transparent elements that are smaller than the resolution of the lighography to be employed in order to control the transmittance of the actinic light exposure area.

REFERENCES:
patent: 4231811 (1980-11-01), Somekh et al.
patent: 4262070 (1981-04-01), Liu
patent: 4278755 (1981-07-01), Liu
patent: 4308326 (1981-12-01), Wirth
patent: 4417948 (1983-11-01), Mayne-Banton et al.
patent: 4456371 (1984-06-01), Lin
patent: 4600666 (1986-07-01), Zink

Affiliated with

Also associated with

Rating

Lithographic process having improved image quality does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Lithographic process having improved image quality, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lithographic process having improved image quality will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1617786