Lithographic positioning device and device manufacturing method

Details Lithographic positioning device and device manufacturing method Lithographic positioning device and device manufacturing method

2006-02-28

2006-02-28

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000

Reexamination Certificate

active

07006199

ABSTRACT:
A positioning device for positioning an object inside a lithographic apparatus is described. The positioning device includes a first drive unit and a second drive unit for positioning the object. The first drive unit has a first part connected to the object and a second part connected to a first part of the second drive unit. The positioning device further includes a permanent magnet system constructed and arranged to provide at least part of the force for accelerating or decelerating the object.

REFERENCES:
patent: 5767948 (1998-06-01), Loopstra et al.
patent: 6054784 (2000-04-01), Sperling et al.
patent: 6124923 (2000-09-01), Horikawa
patent: 6259174 (2001-07-01), Ono
patent: 6891599 (2005-05-01), Iwamoto

Affiliated with

Also associated with

Rating

Lithographic positioning device and device manufacturing method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Lithographic positioning device and device manufacturing method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lithographic positioning device and device manufacturing method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3657076