Lithographic objective having a first lens group including...

Details Lithographic objective having a first lens group including... Lithographic objective having a first lens group including...

2007-10-30

2007-10-30

Harrington, Alicia M (Department: 2873)

Optical: systems and elements

Lens

Multiple component lenses

C359S649000

Reexamination Certificate

active

11350941

ABSTRACT:
A projection objective includes a first lens group (G1) of positive refractive power, a second lens group (G2) of negative refractive power and at least one further lens group of positive refractive power in which a diaphragm is mounted. The first lens group (G1) includes exclusively lenses of positive refractive power. The number of lenses of positive refractive power (L101to L103;L201,L202) of the first lens group (G1) is less than the number of lenses of positive refractive power (L116to L119;L215to L217) which are mounted forward of the diaphragm of the further lens group (G5).

REFERENCES:
patent: 4030805 (1977-06-01), Rogers
patent: 4948238 (1990-08-01), Araki et al.
patent: 5781278 (1998-07-01), Matsuzawa et al.
patent: 5835285 (1998-11-01), Matsuzawa et al.
patent: 5920379 (1999-07-01), Matsuyama
patent: 5930049 (1999-07-01), Suenaga et al.
patent: 5969803 (1999-10-01), Mercado
patent: 5986824 (1999-11-01), Mercado
patent: 5990926 (1999-11-01), Mercado
patent: 6008884 (1999-12-01), Yamaguchi et al.
patent: 6084723 (2000-07-01), Matsuzawa et al.
patent: 6088171 (2000-07-01), Kudo
patent: 6198576 (2001-03-01), Matsuyama
patent: 6259508 (2001-07-01), Shigematsu
patent: 6333781 (2001-12-01), Shigematsu
patent: 6349005 (2002-02-01), Schuster et al.
patent: 6377338 (2002-04-01), Suenaga
patent: RE37846 (2002-09-01), Matsuzawa et al.
patent: 6522484 (2003-02-01), Schuster
patent: 6538821 (2003-03-01), Takahashi
patent: 6556353 (2003-04-01), Omura
patent: 6560031 (2003-05-01), Shafer et al.
patent: 6590745 (2003-07-01), Yagi
patent: 6674513 (2004-01-01), Omura
patent: 6683729 (2004-01-01), Schuster
patent: 6781766 (2004-08-01), Takahashi
patent: 6788387 (2004-09-01), Schuster et al.
patent: 2002/0008861 (2002-01-01), Singer et al.
patent: 2002/0044260 (2002-04-01), Takahashi et al.
patent: 2002/0060859 (2002-05-01), Yoneyama
patent: 2002/0149855 (2002-10-01), Schuster
patent: 2002/0167650 (2002-11-01), Suzuki
patent: 2002/0186355 (2002-12-01), Omura
patent: 2003/0007253 (2003-01-01), Schuster et al.
patent: 2003/0030916 (2003-02-01), Suenaga
patent: 2003/0048547 (2003-03-01), Schuster
patent: 2003/0112525 (2003-06-01), Reinecke et al.
patent: 2003/0179462 (2003-09-01), Shafer et al.
patent: 2003/0227693 (2003-12-01), Otomo
patent: 1 006 388 (2000-06-01), None
U.S. Appl. No. 09/452,041, filed Nov. 30, 1999.

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