Lithographic objective having a first lens group including...

Details Lithographic objective having a first lens group including... Lithographic objective having a first lens group including...

2006-04-04

2006-04-04

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Lens

Multiple component lenses

C359S774000

Reexamination Certificate

active

07023627

ABSTRACT:
A projection objective includes a first lens group (G1) of positive refractive power, a second lens group (G2) of negative refractive power and at least one further lens group of positive refractive power in which a diaphragm is mounted. The first lens group (G1) includes exclusively lenses of positive refractive power. The number of lenses of positive refractive power (L101to L103; L201, L202) of the first lens group (G1) is less than the number of lenses of positive refractive power (L116to L119; L215to L217) which are mounted forward of the diaphragm of the further lens group (G5).

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