Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-09-06
2008-09-09
Rutledge, Della J. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C356S509000
Reexamination Certificate
active
07423725
ABSTRACT:
In calibration of overlay performance of an immersion lithographic apparatus, two sets of overlay data are obtained from exposures carried out using, for example, normal and reversed meanders. The two data sets can then be used to eliminate effects due to substrate cooling.
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European Search Report for EP Appl. No. 06254621.3-1226 issued Dec. 19, 2006.
De Jong Frederik Eduard
De Kort Antonius Johannes
Goorman Koen
Maria Zaal Koen Jacobus Johannes
Menchtchikov Boris
Pillsbury Winthrop Shaw & Pittman LLP
Rutledge Della J.
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