Lithographic mask structure and process for preparing the same

Details Lithographic mask structure and process for preparing the same Lithographic mask structure and process for preparing the same

1988-02-01

1989-02-14

Kittle, John E.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

378 34, 378 35, G03F 900, G21K 500

Patent

active

048046000

ABSTRACT:
There is disclosed a lithographic mask structure including a mask support film, and a support substrate, wherein the peripheral portion of the mask support film is attached on the surface of the support substrate which has a groove.

REFERENCES:
patent: 3311425 (1967-03-01), Schraub
patent: 3504878 (1970-04-01), Dressler
patent: 4171489 (1979-10-01), Adams et al.
patent: 4260670 (1981-04-01), Burns
patent: 4454209 (1984-06-01), Blais
patent: 4579616 (1986-04-01), Windeschmann et al.
patent: 4677042 (1987-06-01), Kato et al.

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