Lithographic mask structure and device for positioning the same

Optics: measuring and testing – Angle measuring or angular axial alignment – Sides of angle or axes being aligned transverse to optical...

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356152, 356154, G01B 1126

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active

050429450

ABSTRACT:
A mask structure and a mask positioning device, executes accurate and quick positioning of a mask having a generally ring-like shape. The mask structure includes a supporting frame of a generally ring-like shape, and at least one flat surface formed by a mirror surface is provided at a peripheral part of the supporting frame. Light is projected upon the flat surface and, on the basis of detection of reflected light therefrom, the mask can be positioned with respect to the rotational direction, the inclination and orthogonal coordinate position. The mask positioning device is adapted to execute such positioning accurately and quickly.

REFERENCES:
patent: 3449961 (1969-01-01), Samsel
patent: 3583815 (1971-06-01), Kersey
patent: 3657792 (1972-04-01), Hug et al.
patent: 3695767 (1972-10-01), George et al.
patent: 3954339 (1976-05-01), Atwood et al.
patent: 4298281 (1981-11-01), Schave
patent: 4573791 (1986-03-01), Phillips
patent: 4801120 (1989-01-01), Katoh et al.
Patent Abstracts of Japan, vol. 7, No. 260, p. 166 P237.

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